エレクトレットを用いた静電誘導型MEMS発電器

抄録

Vibration energy harvesting is a method by which kinetic energy present in the environment or by mechanical vibration is captured and then converted into electricity for powering wireless sensors in various applications such as sensor network and structural health monitoring. In the present paper, after a brief introduction to vibration energy harvesting, electret materials and charging technologies, recent progress in MEMS electret generators is overviewed.