抄録
We are examining positioning mechanisms that facilitate levitating movement via air films generated by piezoelectric elements (piezo). We have achieved control of levitation height and estimation of levitation height through analyzing the fluctuations in the air film caused by vertical vibrations of the piezo. It has been reported that when a piezo operates at large amplitudes, variations in drive frequency and applied voltage near the resonance frequency can trigger abrupt changes in vibration velocity and current. This phenomenon, known as the "jumping and dropping phenomenon," poses significant challenges. This paper evaluates the vibration and electrical characteristics of the levitation actuator as the drive frequency is varied both discretely and continuously. We aim to clarify the impact of these variations on levitation performance.
