[volume title in Japanese]
Conference information
Host: The Japan Society of Applied Physics
Name : [in Japanese]
Number : 58
Location : [in Japanese]
Date : October 02, 1997 - October 05, 1997
[title in Japanese]
Keywords:
Thin Films・Surfaces,
Beam Technologies,
Semiconductors A (Silicon),
Amorphous Materials,
Rare Earth Elements in Semiconductors
Pages 705-920
Details
Article 1st page
