[volume title in Japanese]
Conference information
Host: The Japan Society of Applied Physics
Name : [in Japanese]
Number : 46
Location : [in Japanese]
Date : March 28, 1999 - March 31, 1999
[title in Japanese]
Keywords:
Thin Films・Surfaces,
Beam Technologies,
Semiconductors A (Silicon),
Amorphous Materials,
Rare Earth Elements in Semiconductors,
Si Nano-Devices
Pages 555-806
Details
Article 1st page
