[volume title in Japanese]
Conference information
Host: The Japan Society of Applied Physics
Name : [in Japanese]
Number : 48
Location : [in Japanese]
Date : March 28, 2001 - March 31, 2001
[title in Japanese]
Keywords:
Thin Films・Surfaces,
Beam Technologies,
Semiconductors A (Silicon),
Amorphous Materials,
Si Nano-Devices,
Fundamental Science of plasma CVD and its application
Pages 535-800
Details
Article 1st page
