[volume title in Japanese]
Session ID : 18p-E1-5
Conference information
Host: The Japan Society of Applied Physics
Name : [in Japanese]
Number : 59
Location : [in Japanese]
Date : March 15, 2012 - March 18, 2012
Work Function Measurement of C/W Stacked Structure on SiO2 Gage Dielectrics
*[in Japanese], [in Japanese], [in Japanese], Parhat Ahmet, [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
Author information
Keywords:
18p-E1-5,
work function, carbide
Details
Article 1st page
