[volume title in Japanese]
Session ID : 12a-C9-6
Conference information
Host: The Japan Society of Applied Physics
Name : [in Japanese]
Number : 73
Location : [in Japanese]
Date : September 11, 2012 - September 14, 2012
Selected Deposition of High-Quality Aluminum Film by Liquid Process
Keywords:
12a-C9-6,
Novel Materials for Thin Films,
aluminum, selected deposition, platinum catalyst
Details
Article 1st page
