The 60th JSAP Spring Meeting 2013
Session ID : 29p-PA9-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 60
Location : [in Japanese]
Date : March 27, 2013 - March 30, 2013
Detailed Study on the c-Si Surface Passivation Mechanism of O3-Based Batch Atomic Layer Deposited AlOx for Solar Cell Applications
*Hyunju Lee, [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
Author information
Keywords:
29p-PA9-11,
Aluminum oxide surface passivation,
Atomic layer deposition,
Silicon solar cell
Details
Article 1st page
