JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 74th JSAP Autumn Meeting 2013
Session ID : 20p-C8-1
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KFM Measurement of Nano-Scale Selectively Doped Silicon Channel
*Krzysztof TyszkaDaniel MoraruTakeshi MizunoRyszard JablonskiMichiharu Tabe
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Keywords: 20p-C8-1, dopant, KFM
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© 2013 The Japan Society of Applied Physics
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