The 74th JSAP Autumn Meeting 2013
Session ID : 18p-PM1-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 74
Location : [in Japanese]
Date : September 16, 2013 - September 20, 2013
High power and unfocused ion assisted deposition of oxide films on the fixable substrate
*Po-Kai Chiu, Hung-Pin Chen, Wen-Hao Cho, Chien-Nan Hsiao, Chih-Bin Chiang, Shun Wen Cheng
Author information
Keywords:
18p-PM1-11,
2013 JSAP-MRS Joint Symposia,
Symposium E: Functional Oxide Thin Films and Heterostructures for Innovative Devices
Details
Article 1st page
