The 74th JSAP Autumn Meeting 2013
Session ID : 17p-M7-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 74
Location : [in Japanese]
Date : September 16, 2013 - September 20, 2013
Elemental Distribution Analysis in Semiconductor-Based MOS Devices with Atom Probe Tomography
Keywords:
17p-M7-2,
2013 JSAP-MRS Joint Symposia,
Symposium F: Nanoscale 3D Tomography, Time-resolved Imaging and Dynamic Characterization of Nanostructured Materials and Devices
Details
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