The 74th JSAP Autumn Meeting 2013
Session ID : 18p-PM3-22
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 74
Location : [in Japanese]
Date : September 16, 2013 - September 20, 2013
Single crystal diamond MEMS/NEMS
*Meiyong Liao, Masaya Toda, Liwen Sang, Masataka Imura, Naoki Ikeda, Jiangwei Liu, Shuiji Tanaka, Yasuo Koide
Author information
Keywords:
18p-PM3-22,
2013 JSAP-MRS Joint Symposia,
Symposium M: Diamond Technology: New Developments in Electronic, Photonics and Quantum Devices
Details
Article 1st page
