JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 61st JSAP Spring Meeting 2014
Session ID : 17p-PA2-12
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InAs/InAlGaAs Highly-Stacked Quantum Dot Intermixing by ICP-RIE Etching Technique for Low-Loss Optical Waveguides Aimed for Integration with SOA
*Asuka MatsushitaAtsushi MatsumotoYuuki TakeiKouichi AkahaneYuichi MastushimaKatsuyuki Utaka
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Keywords: 17p-PA2-12
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© 2014 The Japan Society of Applied Physics
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