The 61st JSAP Spring Meeting 2014
Session ID : 17p-F4-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Smoothing of Ru thin film with Gas Cluster Ion Beam (I)
*Akira Yamaguchi, Inaba Kenji, Ryo Hinoura, Noriaki Toyoda, Ken-ichi Hara, Nozomu Hatakeyama, Akira Miyamoto, Isao Yamada
Author information
Keywords:
17p-F4-6
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