JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 61st JSAP Spring Meeting 2014
Session ID : 19p-E13-15
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Annealing in N2-CO of AlN buffer layers on sapphire and MOVPE growth of AlN
Gou NishioShuhei Suzuki*Hideto MiyakeKazumasa HiramatsuHiroyuki FukuyamaYuki TokumotoYoichi Yamada
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Keywords: 19p-E13-15, AlN, MOVPE
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© 2014 The Japan Society of Applied Physics
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