The 61st JSAP Spring Meeting 2014
Session ID : 17a-E14-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Estimation of diaphragm deformation induced by molecular adsorption on a MEMS optical interferometric biosensor
Details
Article 1st page
