The 61st JSAP Spring Meeting 2014
Session ID : 19p-E15-16
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Conductive DLC Film Prepared by NBECVD for Bio-LSI Sensor
*Xijiang Chang, Yoshiyuki Kikuchi, Masanori Nakano, Kumi Inoue, Tomokazu Matsue, Toshihisa Nozawa, Seiji Samukawa
Author information
Keywords:
19p-E15-16
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