The 61st JSAP Spring Meeting 2014
Session ID : 19p-D9-18
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Effects of Nitrogen Concentration on the Electrical Properties of HfN Gate Insulator Formed by ECR Plasma Sputtering
Details
Article 1st page
