JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 61st JSAP Spring Meeting 2014
Session ID : 18p-D8-11
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Study of the pre-deposition treatment for Al2O3/GaSb MOS structures
*Takahiro GotowSachie FujikawaHiroki I. FujishiroMutsuo OguraTetsuji YasudaTatsuro Maeda
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Keywords: 18p-D8-11, GaSb, MOS, Al2O3
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© 2014 The Japan Society of Applied Physics
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