The 61st JSAP Spring Meeting 2014
Session ID : 19p-PG2-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Physical understanding of La-silicate gate dielectrics thermally formed by interface reaction on Si(110) and (111)
*Takuya Seki, Kuniyuki Kakushima, Yoshinori Kataoka, Akira Nishiyama, Nobuyuki Sugii, Hitoshi Wakabayashi, Kazuo Tsutsui, Kenji Natori, Hiroshi Iwai
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