The 61st JSAP Spring Meeting 2014
Session ID : 19p-PG2-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Investigation of Suppression Mechanism of High-k/Ge Interfacial Reaction Using Ultrathin AlOx Insertion
*Shingo Ogawa, Naohiko Kawasaki, Kosuke Kimura, Ryohei Tanaka, Yuya Minoura, Takuji Hosoi, Takayoshi Shimura, Heiji Watanabe
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