JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 61st JSAP Spring Meeting 2014
Session ID : 18a-E14-2
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Circuit integration on crystalline orientated gamma-Al2O3/Si(001) substrate and its characterization
*Koji OishiDaisuke AkaiMakoto Ishida
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Keywords: 18a-E14-2, Al2O3
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© 2014 The Japan Society of Applied Physics
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