The 61st JSAP Spring Meeting 2014
Session ID : 19p-F12-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Fabrication and characterization of Si quantum dots using SF6 dry etching technique
Keywords:
19p-F12-6
Details
Article 1st page
