The 61st JSAP Spring Meeting 2014
Session ID : 19p-F12-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
High performance strained GeOI nMOSFETs with in-situ doped epitaxial SiGe stressors
*Yuuichi Kamimuta, Yoshihiko Moriyama, Eiko Mieda, Tatsuro Maeda, Jevasuwan Wipakorn, Yuichi Kurashima, Hideki Takagi, Minoru Oda, Toshifumi Irisawa, Keiji Ikeda, Etsuo Kurosawa, Tsutomu Tezuka
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