The 61st JSAP Spring Meeting 2014
Session ID : 19p-E2-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Direct deposition of high-k Y2O3 on h-BN by ALD
*Nobuaki Takahashi, Kosuke Nagashio, Tomonori Nishimura, Akira Toriumi, Takashi Taniguchi, Kenji Watanabe
Author information
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