JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 61st JSAP Spring Meeting 2014
Session ID : 18p-PA5-5
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Microprocessing and Surface Modification by Xe Laser Plasma Soft X-ray
*Sho Amano
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Keywords: 18p-PA5-5, Teflon, PMMA
CONFERENCE PROCEEDINGS FREE ACCESS

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© 2014 The Japan Society of Applied Physics
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