The 75th JSAP Autumn Meeting 2014
Session ID : 18a-A18-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Investigation of Etching Process of III-V Layer toward III-V/SOI Hybrid Devices by using Plasma Activated Bonding
*Junichi Suzuki, Yusuke Hayashi, Yuki Kuno, JoonHyun Kang, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
Author information
Keywords:
18a-A18-3
Details
Article 1st page
