The 75th JSAP Autumn Meeting 2014
Session ID : 18p-A8-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
The change of electrical resistivity due to various gas species of amorphous carbon nitride films prepared by reactive RF sputtering
*Naoyuki Tamura, Masami Aono, Hisashi Miyazaki, Nobuaki Kitazawa, Yoshihisa Watanabe
Author information
Keywords:
18p-A8-4
Details
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