JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 75th JSAP Autumn Meeting 2014
Session ID : 17p-A19-6
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Demonstration of poly-Ge growth by flash lamp annealing and the MOSFET operation
*Koji UsudaYoshiki KamataYuuichi KamimutaTakahiro MoriMasahiro KoikeTsutomu Tezuka
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Keywords: 17p-A19-6, Ge, MOSFET
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© 2014 The Japan Society of Applied Physics
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