The 75th JSAP Autumn Meeting 2014
Session ID : 20a-PA2-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
The influence of annealing for Si0.99C0.01 S/D n-MOSFET with electron irradiation
*Masato Hori, Masashi Yoneoka, Toshiyuki Nakashima, Eddy Simoen, Cor Claeys, Isao Tsunoda, Kenichiro Takakura
Author information
Keywords:
20a-PA2-10,
MOSFET
Details
Article 1st page
