The 75th JSAP Autumn Meeting 2014
Session ID : 19a-A17-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Evidence for Si up-diffusion during scavenging of interfacial SiO2 in HfO2/SiO2/Si stack
Details
Article 1st page
