JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 75th JSAP Autumn Meeting 2014
Session ID : 20a-PA3-5
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 75

Location : [in Japanese]

Date : September 17, 2014 - September 20, 2014

Identification of electrical breakdown spots of polycrystalline HfO2 films
*Yusuke Tomura, Ryu Hasunuma, Kikuo Yamabe, Shinji Migita
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Keywords: 20a-PA3-5
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© 2014 The Japan Society of Applied Physics
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