The 75th JSAP Autumn Meeting 2014
Session ID : 17p-PA1-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
A Study of a Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers
*Shota Kamei, Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
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