The 75th JSAP Autumn Meeting 2014
Session ID : 20a-A20-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Observations of vacancy and interstitial distributions depending on pulling rates during CZ silicon crystal growth by detaching from the melt
Keywords:
20a-A20-4
Details
Article 1st page
