The 75th JSAP Autumn Meeting 2014
Session ID : 17a-PB4-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
The effects of firing process on electrical properties of SiNx/Si structure
*Yuya Enomoto, Toru Takayanagi, Haruhiko Yoshida, Kouji Arafune, Atsushi Ogura, Shinichi Satoh
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