JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 75th JSAP Autumn Meeting 2014
Session ID : 17a-PB4-18
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Stability of Liquid Source SiO2 Passivation on Silicon Surface
*Chihiro HagiwaraHiroshi Nagayoshi
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Keywords: 17a-PB4-18, passivation
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© 2014 The Japan Society of Applied Physics
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