The 75th JSAP Autumn Meeting 2014
Session ID : 19p-A25-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Effect of thermal annealing on passivation quality of ALD-AlOx film
*Hiroki Imaeda, Shohei Miki, Atsushi Ogura, Haruhiko Yoshida, Shin-ichi Satoh, Koji Arafune
Author information
Keywords:
19p-A25-13,
AlOx
Details
Article 1st page
