The 75th JSAP Autumn Meeting 2014
Session ID : 19a-C8-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 75
Location : [in Japanese]
Date : September 17, 2014 - September 20, 2014
Development of 193-nm narrow-linewidth solid state laser system using CLBO crystal for ArF excimer laser seeding.
*Hironori Igarashi, Hongwen Xuan, Zhigang Zhao, Shinji Ito, Kouji Kakizaki, Yohei Kobayashi
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