The 62nd JSAP Spring Meeting 2015
Session ID : 12p-B5-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Application of ferroelectric thin films to piezoelectric MEMS
*Takeshi Kobayashi, Natsumi Makimoto, Hironao Okada, Seiichi Takamatsu, Yasuhiro Suzuki, Toshihiro Itoh, Ryutaro Maeda
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