The 62nd JSAP Spring Meeting 2015
Session ID : 12p-D15-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
A Study on Sub-1G-to-20G Integrated MEMS Accelerometer
*Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
Author information
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