The 62nd JSAP Spring Meeting 2015
Session ID : 12p-P8-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Fabrication of Amorphous Carbon Nitride Thin Films
*Kazuya Uchijima, Masaki Satake, Shigeyuki Nakamura, Ken-Ichi Takarabe, Kazutoshi Fukui, Kunio Itoh, Shin-Ichi Yamamoto
Author information
Details
Article 1st page
