The 62nd JSAP Spring Meeting 2015
Session ID : 12a-P12-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Electrical Measurements of ALD-Al2O3 MOS Capacitors with Different Oxidants
*RYO FUKUI, Yoshinori Nakamura, Kuniyuki Kakushima, Yoshinori Kataoka, Akira Nishiyama, Nobuyuki Sugii, Hitoshi Wakabayashi, Kazuo Tsutsui, Kenji Natori, Hiroshi Iwai
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