The 62nd JSAP Spring Meeting 2015
Session ID : 13a-A24-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Improvement of Insulating Property of Al2O3 Film Utilizing Water Plasma Oxidation for ALD
*Tomoaki Umehara, Masahiro Horita, Koji Yoshitsugu, Yasuaki Ishikawa, Yukiharu Uraoka
Author information
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Article 1st page
