The 62nd JSAP Spring Meeting 2015
Session ID : 12a-A21-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Activation of Implanted Si in GaN by Local Laser Annealing
*Takaya Nagai, Akio Wakejima, Takashi Egawa, Tomoya Hirata, Satoshi Ando, Katsuhiko Tani
Author information
Details
Article 1st page
