The 62nd JSAP Spring Meeting 2015
Session ID : 12a-D1-4
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
62
Location :
[in Japanese]
Date :
March 11, 2015 - March 14, 2015
Effects of Oxygen-Gas-Flow Rates and Ga Contents on Structural Properties of Ga-Doped ZnO Films Prepared by Reactive Plasma Deposition with a DC Arc Discharge