JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 62nd JSAP Spring Meeting 2015
Session ID : 12a-D1-4
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Effects of Oxygen-Gas-Flow Rates and Ga Contents on Structural Properties of Ga-Doped ZnO Films Prepared by Reactive Plasma Deposition with a DC Arc Discharge
*Tomoaki TerasakoJunichi NomotoHisao MakinoSho ShirakataTetsuya Yamamoto
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© 2015 The Japan Society of Applied Physics
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