JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 62nd JSAP Spring Meeting 2015
Session ID : 12a-D1-9
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Helicon-Wave-Excited-Plasma Sputtering Epitaxy of ZnO films using the hydrothermal ZnO target (3): about shallow impurities
*Yoshiki YamazakiKentaro FurusawaSakuya IwahashiKazunobu KojimaShigefusa Chichibu
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© 2015 The Japan Society of Applied Physics
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