JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 62nd JSAP Spring Meeting 2015
Session ID : 14a-D1-2
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Polarity control of ZnO thin films by a RF Magnetron Sputtering Method
*Kei TsunodaTakeo OhsawaNaoki OhashiTakamasa Ishigaki
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Keywords: 14a-D1-2, ZnO, XPS, Thin film
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© 2015 The Japan Society of Applied Physics
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