The 76th JSAP Autumn Meeting 2015
Session ID : 14p-2C-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Change in optical properties by texturing Si compounds by F2 and NOx gases
*Satomi Tajima, Toshio Hayashi, Minoru Sasaki, Koji Yamakawa, Kenji Ishikawa, Makoto Sekine, Masaru Hori
Author information
Keywords:
14p-2C-11,
JSAP-OSA Joint Symposia 2015,
Optical Micro-sensing, Manipulation, and Fabrications,
optical materials with nano particles, sub-wavelength structures,
Chemical dry etching,
Texturing,
Photovoltaic cell
Details
Article 1st page
