The 76th JSAP Autumn Meeting 2015
Session ID : 15p-4F-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Fabrication of low-resistivity (1 mΩcm) diamond by hot-filament CVD
*Shinya Omagari, Hideaki Yamada, Hitoshi Umezawa, Akiyoshi Chayahara, Shin-ichi Shikata, Yoshiaki Mokuno
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