The 76th JSAP Autumn Meeting 2015
Session ID : 15p-PB2-48
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Comparision of He, Ar added in Penning effect Using a Plasma-Based Ion Implantation.
*takanobu takeuchi, Kazuhiro Shimono, Hiromitu Noguchi, Koji Kakugawa, Takeshi Tanaka
Author information
Keywords:
15p-PB2-48,
Plasma-Based Ion Implantation method
Details
Article 1st page
